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Gererally according to the booklet in the box. If you no longer have those instructions, simply clean out the basin, make sure no mold, dust, hardwater or calcium is deposited. Use a 10% bleach water solution to kill bacteria, and thats is basically it. Just dont miss any spots, but humdifiers should be cleaned every few uses.
When you cleaned it , did you remove water level sensor? If so did you put it back in upside down? The sensor is a plastic cylinder that is held down by a screw and washer.. If you have it in upside down, the empty water red light will be lit,,, if you unscrew the sensor and flip it .. it should start to work again..
EZCal Humidifier Cleaner and Descaler is what the company recomends. Also if you do not have this using equall parts of vinegar to water use the brush that came with unit. Now with this at first use if using vinegar and water it will have an odor, but the EZcal is odorless
Interestingly enough as soon as I posted here, I was able to find the source of the problem. It appears that during cleaning the water level sensor, a bobber which normally floats as the water level rises, became stuck the to bottom of the water base - see below for the picture. I was able to use a small wooden spoon to lightly apply pressure and release the bobber so that it could float, and instantly the vapor started flowing again.
Okay, I just started getting this same deal with my 7133 on it's third season. I found in a blog that if you hold down the button that controls the heat while turning the mist knob on, it resets the machine. It worked. The red light went green and I turned off the heat button for cool air and the upper light still stayed green. Fingers crossed this continues to work. good luck!
Soak it with vinegar for several hours then use a soft nylon bristled brush to scrape off the minerlized crust and rinse. You probably need to replace the silver stick & mineralization cartridge more often.