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You can clean these with brake cleaner or something comparable. Brake cleaner doesn't leave a residue. If it is mounted directly to the throttle body, then clean all of it. Start the car rev it up and spray it in, Keep the rpm's high enough so not to kill the engine. You don't have to use the entire can. Fords are the same way, the start to run bad because the MAF gets contaminated with oil and dust, spray them off and all is good till next time. Just a note.... Never use a brush or anything on the MAF, as you said they are very sensitive